JPH02102466U - - Google Patents
Info
- Publication number
- JPH02102466U JPH02102466U JP971489U JP971489U JPH02102466U JP H02102466 U JPH02102466 U JP H02102466U JP 971489 U JP971489 U JP 971489U JP 971489 U JP971489 U JP 971489U JP H02102466 U JPH02102466 U JP H02102466U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- treatment apparatus
- seal flange
- surface treatment
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 10
- 239000000498 cooling water Substances 0.000 claims description 2
- 238000004381 surface treatment Methods 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 4
- 238000001816 cooling Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP971489U JPH02102466U (en]) | 1989-01-30 | 1989-01-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP971489U JPH02102466U (en]) | 1989-01-30 | 1989-01-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02102466U true JPH02102466U (en]) | 1990-08-15 |
Family
ID=31216701
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP971489U Pending JPH02102466U (en]) | 1989-01-30 | 1989-01-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02102466U (en]) |
-
1989
- 1989-01-30 JP JP971489U patent/JPH02102466U/ja active Pending